複合材料薄膜ならびに表面あらさの異なるステンレス鋼の表面微細構造と摩擦

概要

論文の詳細を見る
Low frictional coating films made of copper and boron nitride on stainless steel substrates were synthesized by magnetron co-sputter deposition. Friction force of the coating films was observed by a vacuum friction measurement system and a lateral force microscope. Coating film properties, such as surface morphology, internal stress and surface energy, were also observed by a conventional contact angle measuring system, a scanning auger electron spectrometer and an atomic force microscope. Internal stress and surface energy can be significantly modified depending on coating conditions indicating that they are dependant variables. This technique of co-sputtering deposition is a promising candidate for the control of friction force and surface nano-structures and is well applicable to a vacuum switch, aerospace coatings and microelectromechanical systems.
日本真空協会の論文
2003-02-20