無酸素銅, 銀入無酸素銅, ジルコニウム入無酸素銅から製作したナイフエッジ式フランジ用ガスケットの性能試験

概要

論文の詳細を見る
Performance tests on the gaskets for the knife-edge-type flanges have been carried out for three different materials, namely, Ag-bearing OFC (oxygen-free copper), Zr-bearing OFC and original OFC as a reference. The tests were made by checking helium leak through the joints with the test gaskets before and after high-temperature baking and by measuring the size of the grooves made on the gaskets by joining. The results have shown that the gasket made of 0.02% Zr-bearing OFC with 10% cold work exhibits the most superior characteristic among the three materials, especially when the joints are subjected to high-temperature baking. This is probably due to the fact that the hardness change in the Zr-bearing OFC is very small in the measured temperature range between room temperature and 400°C in comparison to those of the other two materials.
日本真空協会の論文