2-2 振動発電デバイスのためのダイシング加工による強誘電体Pb(ZrTi)O_3への微細溝形成(OS2-2 三次元の微細形状創成技術)

概要

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Microfabrication technology of high aspect ratio trenches in bulk ferroelectric substance including Pb(ZrTi)O_3 by dicing saw was studied in this study. Fabrication speed of this method is faster than conventional plasma etching. Therefore, this method is suitable for fabrication of high-aspect trenches in the ferroelectric substrate. In this study, we used a dicing blade to fabricate the trenches in PZT plate, in which abrasive grains is bonded by electroplated metal or resin. The optimal trenches with 50.8μm in width and 50.7μm in depth (aspect ratio 1.0) was fabricated when the grain size of abrasive and feeding speed is approximately 13μm and 10mm/sec, respectively. As a result, fabrication of the high-aspect trenches was achieved of which. Finally, a test of energy harvesting was carried out, in which the PZT plate having trenches faced to an electret devices was vibrated horizontally. As a result, the maximum experimental output power of 750nW was achieved for 80Hz/80μm forced vibration.
2011-09-25