3-6 鋳型成型法によるBaTiO_3/エポキシ樹脂複合強誘電体の微細溝形成とその振動発電への応用(OS3 電池レス・デバイスのためのエネルギーハーベストの展開)

概要

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We propose a fabrication method of dielectric plate having trenches, in which a composite material of nano-BaTiO_3 particles and epoxy-resin is casted into a mold of patterned thick photosensitive dry film. The features are, 1) the relative dielectric constant ε_r is a dozen, which is no less than those of other polymer-based ferroelectric such as poly-vinylidene-difluoride (PVDF), 2) fabrication is compatible to MEMS process, i.e., the size and pattern of trenches are flexibly designed as far as photolithographic resolution admits, 3) trench depth is several tens micron thanks to thick film resist. We applied it to an electret energy harvesting device based on fringe electrical field change inside trenched ferroelectric. The experimental output power of 2.9nW was achieved for 80Hz/80μm forced vibration.
一般社団法人日本機械学会の論文
2011-09-25