4223 PZT基板とパリレンフィルムを用いたマイクロ加速度センサの開発(J24-2 生産機械のマイクロ化(2))

概要

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Authors have already reported a micro accelerometer made of Parylene, which comprises a proof mass and support beams. The measurement principle is detecting capacitance change according to dielectric mass movement in a fringe electrical field. Owing to low dielectric constant of Parylene (ε_r=3.15), the sensitivity is comparatively low at present state. This paper newly proposes an accelerometer using ferroelectric material having large dielectric constant such as bulk PZT (ε_r=2600) instead of Parylene. Since micromachining of suspended structure of bulk PZT is difficult, it is used as a substrate. It is confirmed by FEM simulation that the proposed accelerometer is effective for obtaining high sensitivity.
一般社団法人日本機械学会の論文
2007-09-07