MP-54 MEMS慣性センサのクロストーク低減を目的としたマイクロばね構造の開発と評価 : 高速度カメラによるばね運動の直接観察(ポスターセッション)

概要

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In this study, we proposed and developed a novel micro-spring structure to minimize crosstalk (transverse sensitivity) in a MEMS-based inertial force sensor. In general, an inertial force sensor has a vibration system which is consist of some springs and a proof mass. The sensitivity of the sensor increases when its spring constant becomes small; however, it enhances the crosstalk caused by the transverse axis vibration. In the proposed structure, transverse axis vibration is deceased by employing supplemental thin beams between the proof mass and the anchor, the direction of which is perpendicular to the main axis of the vibration. On the other hand, each supplemental beam is desired to be thin enough not to prevent the vibration of proof mass along the main axis. Design of the proposed system was optimized by FEM simulation. Finally, the proposed system was fabricated using MEMS technology, and the vibration characteristic was directly observed by a high-speed camera.
一般社団法人日本機械学会の論文
2011-09-25