3-09P-62 非鉛系アレイ形積層圧電セラミックス駆動の屈曲2重モード片持ちはりモータ(ポスターセッション 3)

概要

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The double-mode miniature cantilever-type ultrasonic motor was fabricated using the array-type multilayer piezoelectric ceramics (array-type MLPC) of (Sr, Ca)_2NaNb_5O_<15> (SCNN) such as Pb-free piezoelectric materials, and the electrical driving properties were investigated. The array-type MLPC was arranged in a 2x2 matrix on the actuators. The ultrasonic motor of SCNN array-type MLPC started to rotate at 1.7V_<p-p,>, and showed such characteristics as revolution speed of Ω_0=1000 rpm, a torque of T_0=2.6μNm at 9V_<p-p>. On the other hand, the motor using Pb (Zr, Ti)O_3-Pnb(Zn, Nb)O_3(PZT) showed Ω_0=1000 rpm, a torque of T_0=2.6μNm at 1V_<p-p>. SCNN motor was not so different from PZT motor, however the SCNN motor needed 10 times as high voltage as the PZT motor. By using the array-type MLPC, the driving voltage was reduced by a half, and the driving properties were improved.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2007-11-14