J-2 非鉛系積層圧電セラミックスを用いた小型超音波モータ : 片持ち張り・屈曲2重モード利用モータの試作(強力超音波)

概要

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The miniature cantilever-type ultrasonic motors were fabricated using the multilayer piezoelectric ceramics (MLPC) of PZT type piezoelectric materials and (Sr,Ca)_2NaNb_5O_<15> (SCNN) such as lead free piezoelectric materials, and investigated the properties of driving. The displacement of MLPC of PZT was 180nm at 10V and that of MLPC of SCNN was 170nm at 100V. The ultrasonic motor with MLPC of PZT was generated over 0.2 V_<p-p> and 4000rpm, 4.7μN at 6 V_<p-p>. On the other hand, the ultrasonic motor with SCNN was generated over 3 V_<p-p> and 570rpm at 20 V_<p-p>. It was confirmed that ultrasonic motor using lead free piezoelectric materials could generated at 10-fold voltage of MLPC of PZT.
2006-11-15