1603 環境に優しいスライシング方式の提案(S79-1 先端材料と加工(1),S79 先端材料と加工)

概要

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As a slicing method of a hard and brittle materials represented by a silicon ingot, slicing by multi-wire saw becomes the mainstream. In precision slicing by multi-wire saw, there are many cases to adopt a loose abrasive method. Work environment deteriorates to use a large quantity of slurry in loose abrasive method, and a large quantity of waste slurry needs processing as industrial waste. In this study, the new slicing method that considered environment is suggested. They are the method which used high viscosity slurry, and the method which used half fixation abrasive wire tool.
社団法人日本機械学会の論文
2006-09-15