マルチワイヤソー切断用スラリーからの砥粒分離と砥粒再利用の可能性

概要

論文の詳細を見る
The possibility of recovery and reutilization of abrasive grains from the spent slurry for multiwire saw slicing was experimentally examined. The upward flow filtration can separate the abrasives from the spent slurry, when the filter has the particle retention ability which obstructs the passage of abrasives while the Si chips freely pass through. The separation performance of abrasives and chips was dominated by the difference of particle size and lipophilic property between abrasives and chips. The reprocessed abrasive grains showed a similar slicing performance to that of virgin ones. The rate of slicing was equivalent to the work feed rate even in the slicing using the spent abrasives. However, using the spent abrasives made the surface roughness worse under certain slicing condition. Keep the good suspension of abrasives and separation of cleaved abrasives would be important problems for reutilization of spent abrasive grains.
公益社団法人精密工学会の論文
2004-05-05