ワーク回転型マルチワイヤソーのスライシング性能に関する研究 : 束状被削材方式に関する基礎的実験

概要

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Work rotating type multi-wire sawing is a superior slicing method of hard and brittle materials represented by silicon ingots and ceramics. However, this slicing method has some problems. The bundled workpieces method was suggested in order to solve some such problems. The main purpose of this study is to make clear the fundamental slicing performance of work rotating type multi-wire saw which applied bundled workpieces method. Work material used in this study is borosilicate glass bundled up. The main results obtained are as follows. (1) Bundled workpieces method has applicability for rapid feed of work material, and sliced surface is not susceptible to the feed speed of work material. (2) Sliced surface roughness is different from initial sliced surface in final sliced surface slightly. Initial sliced surface is a little excellent in comparison with final sliced surface. (3) Slicing rate improves slightly by controlling a rotating speed of work material. (4) Stable slicing can be expected by increasing work material to bundle up. (5) As for the shape of work material to bundle up, slicing is possible even besides a column. (6) When shape of work material includes an edge, kerf width of a part of an edge tends to become wide.
社団法人精密工学会の論文
2005-04-05