マルチワイヤソーのスライシング機構に関する研究 : 基礎的な評価関数の導出とその有用性

概要

論文の詳細を見る
In late years, multi-wire saw has been used for the slicing of a silicon ingot for solar batteries, and multi-wire sawing is going to become the mainstream of precision slicing method for hard and brittle materials. However, in slicing by multi-wire saw, the technique for appropriately evaluating the severity of the slicing state or the slicing conditions has not been established yet. Therefore, there are a lot of parts where it relies on expert's experience rule as for the decision of the slicing conditions. In this study, an evaluation functions to evaluate severity of a slicing state or slicing conditions are derived. An analytical technique for modeling the machining process used by other abrasive machining to derive the evaluation functions is applied for multi-wire sawing. And evaluation function "mean depth of cut", "normalized depth of cut" and "specific slicing energy" are derived. In this paper, slicing experiments are done under various slicing conditions, and it is examined about utility of the derived evaluation functions. As a result of investigation, utility of the derived evaluation functions were confirmed.
社団法人精密工学会の論文
2006-12-05