ワーク回転型マルチワイヤソーに関する基礎的研究 : 装置の原理と基礎実験

概要

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Multi-wire sawing is one of the most effective slicing methods for large, hard and brittle materials such as silicon ingots. In order to achieve high efficiency slicing of hard and brittle materials, a new slicing method (work rotating type multi-wire sawing) is devised. When using work rotation type multi-wire saw, the wire maintains intermittent contact with workpiece during the process, thereby makihg it easy for slicing debris to escape from the slicing regions. The main purpose of this study is to make clear the slicing performance of a newly developed work rotating type multi-wire saw. Work material used in the study is borosilicate glass, which is cylindrical. The main results obtained are as follows : (1) The work rotating type multi-wire saw makes it possible to achieve high effirciency in slicing of hard and brittle materials. (2) Work rotating type multi-wire saw is very effective in removing the slicing debris and improving the surface roughness of the sliced surface. (3) High efflciency slicing is achieved when rotational direction of work and running direction of wire are the same. (4) The wire tension should be as large as possible.
公益社団法人精密工学会の論文
2000-12-05