ワーク回転型マルチワイヤソーのスライシング性能に関する研究 : 束状被削材方式の提案

概要

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In order to achieve a high efficiency and accuracy in slicing of hard and brittle materials, a work rotating type multi-wire sawing method has been devised. Work rotating type multi-wire sawing is one of the most effective slicing methods for hard and brittle materials. However, this method has to fix a workpiece at the end of the slicing process. When a diameter of workpiece is large, this fixation becomes difficult. The main purpose of this study is to propose a newly developed bundled workpieces method. By this method, several workpieces are bundled up around a core material and fixation of workpiece becomes needless. This new method is expected to prevent the sliced wafers from scattering and to enable complete slicing. The work material used in this study is borosilicate glass. The main results obtained are as follows. (1) Work rotating type multi-wire sawing using the bundled workpieces method makes it possible to prevent the wafers from breaking off before the completion of slicing, and to prevent them from scattering. (2) Work rotating type multi-waire sawing using coated bundled workpieces makes it possible to stabilize the slicing performance. (3) Work rotating type multi-wire sawing using this method improves the slicing rate. (4) Slicing precision of the normal work rotating type multi-wire sawing and bundled workpieces method is the same grade.
公益社団法人精密工学会の論文
2003-07-05