ワーク回転型マルチワイヤソーのスライシング性能に関する研究 : 高粘度スラリーによるスライシング

概要

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Slicing with work rotating type multi-wire saw will be considered in the near future as one of the effective methods for slicing hard and brittle materials such as silicon ingots. In order to decrease the supplied value of slurry in slicing hard and brittle materials, the work rotating type multi-wire sawing characteristics using high viscosity slurry are investigated experimentally. This type of slurry is inferior to the conventional slurry in removing chips from the slicing regions due to its poor permeability. The wotk rotadng type multi-wire saw is applied to improve the supply on slicing regions. Unlike the slicing process by a conventional multi-wire saw, the wire maintains intermittent contact with the workpiece during the process, thereby making it easy for slicing debris to escape from the slicing regions. Borosilicate glass, which is cylindrical (φ10), is used as wotk material. The main results obtained are as follows. The wotk rotating type multi-wire saw makes it possible to use the slrrny of high viscosity in slicing of hard and brittle materials. Using high viscosity slurry in wotk rotating type multi-wire saw makes it possible to decrease the supplied volume of slurry. The use of high viscosity slurry in wotk rotating type multi-wire saw improves the surface roughness of the sliced surface.
公益社団法人精密工学会の論文
2001-01-05