Electrical Properties of Highly Strained Epitaxial Pb(Zr, Ti)O_3 Thin Films on MgO(100)
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概要
- 論文の詳細を見る
The film thickness (20-200 nm) dependence of the crystalline structure, lattice parameters and electrical properties of highly strained Pb(Zr, Ti)O_3 (PZT) thin films on MgO(100) was investigated. The PZT films were practically c-axis orientation. As the film thickness decreased (< 100 nm), the tetragonality ratio of PZT also decreased owing to the inner expanding strain in the in plane direction. The dielectric constant decreased and the structural phase transition temperature shifted to a lower temperature corresponding with the decrease in the tetragonality ratio. The electric displacement-electric field (D-E) hysteresis curves for the thick (>40 nm) films exhibited a certain amount of remanent polarization in the in-plane direction, implying the formation of a-domains. The relationship between electrical properties and the inner strain is discussed.
- 社団法人応用物理学会の論文
- 1999-09-30
著者
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SHIMIZU Masaru
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi
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松重 和美
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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松重 和美
京都大学大学院工学研究科
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HORIUCHI Toshihisa
Department of Electric Science and Engineering, Graduated School of Kyoto University
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松重 和美
京都大学工学研究科電子物性工学専攻
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Okino Hirotake
Department Of Communications Engineering National Defense Academy
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Horiuchi Toshihisa
Department Of Electronic Science And Engineering Graduate School Of Engineering Kyoto University
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Horiuchi Toshihisa
Department Of Applied Physics Faculty Of Engineering Kyushu University
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Okino Hirotaka
Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University
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Nishikawa Tomoki
Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University
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Matsuhige Kazumi
Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University
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Nishikawa Tomoki
Department Of Electronic Science And Engineering Graduate School Of Engineering Kyoto University
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Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
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Shimizu Masaru
Department Of Electronics Faculty Of Engineering Himeji Institute Of Technology
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Okino H
National Defense Acad. Kanagawa Jpn
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