Electron Microscopic Studies of Structure and Crystallization of Amorphous Metal Oxide Films
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概要
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High-resolution transmission electron microscopy using axial beam illumination was carried out on vacuum-deposited WO_3, TiO_2, and MoO_3 films.In as-deposited WO_3 films thinner than 100 Å and films heated at 350℃ for 2〜5 h which gave rise to amorphous haloes in electron diffraction, crossed fringe-like structure images of the order of 10〜20Å was observed.This means that the amorphous films consisted of micro-crystallites in which the W-O_6 octahedra were arrayed like crystalline WO_3.When the films were heated at 350℃ for 10 h, they grew to crystallites of WO_3 as large as 100Å.On the other hand, in WO_3 films thicker than about 200Å, crystals of a few microns grew after shorter heat treatment.Similar results were obtained for the TiO_2 and MoO_3 films.The differnce in crystallization between the very thin films and the thicker films is interpreted by considering the heat generated during crystallization and its dispersion.
- 社団法人応用物理学会の論文
- 1979-10-05
著者
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Kaito Chihiro
Department Of Physics Kyoto Technical University
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Kaito Chihiro
Department Of Electronics And Information Science Kyoto Institute Of Technology Matsugasaki
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Shiojiri Makoto
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Miyano Toshio
Department Of Science Maizuru Technical College
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Kaito Chihiro
Department Of Electronics And Information Science Kyoto Institute Of Technology
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Shiojiri Makoto
Department Of Electronics And Information Science Kyoto
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