High Resolution Electron Microscopic Studies of Amorphous SiO Film
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概要
- 論文の詳細を見る
High resolution electron microscopic (HREM) observations have been done for vacuum deposited SiO films. Areas 1〜2 nm in size with lattice fringes are seen in the micrographs. It is shown that the films are composed of a mixture of silicon and α-cristobalite.
- 社団法人応用物理学会の論文
- 1984-01-20
著者
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Shimizu Tsukasa
Department Of Physics Kyoto Technical University
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Shimizu Tsukasa
Department Of Electronic And Communication Engineering Faculty Of Science And Engineering Waseda Uni
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Kaito Chihiro
Department Of Electronics And Information Science Kyoto Institute Of Technology
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