Preparation of Si-C Films by Plasma Deposition Process with Neutralization
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1978-09-05
著者
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MAKITA Hiroshi
Kochi University of Technology
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Yoshihara Hideo
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephon Public Corporation
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Kiuchi Mikiho
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Mori Hidefumi
Musashino Electrical Communication Laboratory
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KADOTA Toshiki
Musashino Electric Communication Laboratory, N.T.T.
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Kadota Toshiki
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Kadota Toshiki
Musashino Electric Communication Laboratory N.t.t.
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