2-D Grating Graphoepitaxy of Silicon Films from Silicon-Gold Supersaturated Solution

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概要

• 論文の詳細を見る

• Orientation controlled silicon crystalline films were prepared on fused quartz substrates. The crystallization was performed by precitipation from a Si-Au supersaturated solution. One dimensional (1-D) surface relief gratings with a period of 1 μm and two dimentional (2-D) gratings with a cross angle of 60℃ were used to control the crystal orientation. Silicon films were better aligned on the 2-D gratings than on the 1-D gratings. The (111) crystal plane was parallel to the substrate plane.

• 社団法人応用物理学会の論文
• 1981-12-05

著者

• Mori Hidefumi

  Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Pubric Corporation

• Mori Hidefumi

  Musashino Electrical Communication Laboratory

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