Synthesis of SiC Films by Plasma Deposition Process
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1977-11-05
著者
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Yoshihara Hideo
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Yoshihara Hideo
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephon Public Corporation
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Mori Hidefumi
Musashino Electrical Communication Laboratory
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KIKUCHI Mikiho
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Kikuchi Mikiho
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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MORI Hidefumi
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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