Characterization of Epitaxially Grown Semiconductive Layers by Scattering of Optical Pseudo-Surface Waves and Interference Fringes due to Guided Waves within the Layers
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概要
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When optical pseudo-surface waves are generated by a nearly critical transmission condition, their scattering is very useful for observation of defects, such as dislocations and microcracks near surfaces and also for detection of scratches and dust on the surfaces. Guided waves created by multiple reflections between interfaces make equal-thickness fringes by which fluctuation of their thickness is observed.
- 社団法人応用物理学会の論文
- 1987-10-20
著者
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Ogawa Tomoya
Department Of Physics Gakushuin University
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Ogawa Tomoya
Department Of Agricultural Chemistry Faculty Of Agriculture The University Of Tokyo
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