Microcrystalline Silicon Films Deposited by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using Helium Gas

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-10-01

著者

• LEE KYUNG

  Department of Pediatrics, The Catholic University of Korea

• Lee W

  Departnnent Of Physics Korea Advanced Institute Of Science And Technology

• Shin Sung-chul

  Departnnent Of Physics Korea Advanced Institute Of Science And Technology

• Lee Kyung

  Department Of Anesthesia And Pain Medicine Gachon University Of Medicine And Science Gil Medical Cen

• Shin Sung-chul

  Department Of Physics Korea Advanced Institute Of Science And Technology

• LEE Choochon

  Department of Physics, Korea Advanced Institute of Science and Technology

• Lee Kyung

  Department Of Physics Korea Advanced Institute Of Science And Technology

• LEE Wook

  Department of Chemistry, Korea Advanced Institute of Science and Technology

• Lee Choochon

  Departnnent Of Physics Korea Advanced Institute Of Science And Technology

• Lee Choochon

  Department Of Physics Kaist

• Lee Wook

  Department Of Chemistry Korea Advanced Institute Of Science And Technology

• Lee Kyung

  Department Of Agricultural Chemistry Division Of Applied Life Science Gyeongsang National University

• LEE Wook

  Department of Biology, Chungnam National University

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