High Coercivity in Co/Pt Multilayers

概要

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We have found that the coercivity was increased when a Co/Pt multilayer on a Si_3N_4 underlayer was prepared onto a rotating substrate. A more than twofold increase in the coercivity is thought to be due to the enhancement of domain wall pinning effects caused by an increase of surface roughness in the Si_3N_4 underlayer. According to the results of atomic force microscopy, the surface of the Si_3N_4 underlayer prepared onto a rotating substrate was rougher than that of an underlayer prepared onto a stationary substrate. We believe that the enhancement of surface roughness is due to the oblique incidence of sputtered materials on the rotating substrate.
社団法人応用物理学会の論文
1996-01-30