Electron Spin Resonance Image of Annealing under Thermal Gradient : Chemical Vapor Deposition Poly-Silicon Film
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概要
- 論文の詳細を見る
The spatial distribution of dangling bonds in a CVD poly-silicon film has been measured using a microwave scanning electron spin resonance (ESR) microscope. Uniformity of the spin concentration was imaged on a CRT display. An ESR image caused by thermal annealing of dangling bonds under known spatial temperature distribution (thermal gradient) for an annealing time t_a gives an intensity at each pixel (i, j) corresponding to each temperature, T_<i,j>. The parameters, such as activation energy E and frequency factor v_0, can be obtained in a short period of time by plotting the decay time τ_<i,j> from the intensity ratio I/I_0, i.e., τ_<i,j>=-t_a/ln(I/I_0)_<i,j> against the reciprocal temperature I/T_<i,j>.
- 社団法人応用物理学会の論文
- 1994-08-01
著者
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Ikeya Motoji
Department Of Earth And Space Science Faculty Of Science Osaka University
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Yamamoto Masahiro
Department Of Earth Sciences Okayama University
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Yamamoto Masahiro
Department Of Agricultural Chemistry Faculty Of Agriculture Niigata University
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YAMAMOTO Masahiro
Department of Earth and Space Science, Faculty of Science, Osaka University
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