Changes in Electrical Resistance and Auger Electron Appearance Potential Spectra of Titanium Thin Films by Oxygen Diffusion
スポンサーリンク
概要
- 論文の詳細を見る
The electrical resistances of titanium evaporated films with a thickness of about 100 Å were measured after exposure to oxygen. Increases in the resistance up to an oxygen exposure of 10L follow a nearly straight line, but the increases become smaller as the Tempax glass (borosilicate glass) substrate temperature during titanium evaporation rises. This is thought to be caused by the difference in grain size of the films. A diffusion model of the phenomena is given. Auger electron appearance potential spectra, which give information about chemical bondings, show no evidence of the existence of any stable compounds in the films.
- 社団法人応用物理学会の論文
- 1983-11-20
著者
-
KATO Susumu
Department of Applied Chemistry, Faculty of Engineering & High Technology Research Center, Kansai Un
-
KONISHI Ryosuke
Department of Electrical and Electronic Engineering, Faculty of Engineering, Tottori University
-
Sasaki Hajime
Department Of Electronics Faculty Of Engineering Tottori University
-
Konishi Ryosuke
Department Of Electrical And Electronic Engineering Tottori University
-
Kato Susumu
Department Of Anatomy (1) Jikei University School Of Medicine
-
Kato Susumu
Department of Electronics, Faculty of Engineering, Tottori University
-
KONISHI Ryosuke
Department of Electronics, Faculty of Engineering, Tottori University
関連論文
- An Efficient Aerobic Oxidation of Isobutane to t-Butyl Alcohol by N-Hydroxyphthalimide Combined with Co(II) Species
- Microscopic Analysis of the Degradation Mechanism of Gallium Arsenide Metal-Semiconductor Field-Effect Transistor
- Light Emission and Surface States Annealing on GaAs Metal Semiconductor Field-Effect Transistor
- Decrease in Surface States on GaAs Metal-Semiconductor Field-Effect Transistor by High Temperature Operation
- Investigation of Substrate-dependent Characteristics of SnO_2 Thin Films with Hall Effect, X-Ray Diffraction, X-Ray Photoelectron Spectroscopy and Atomic Force Microscopy Measurements
- Analysis of Surface States of Gallium Arsenide Metal Semiconductor Field-Effect Transistors using Drain Current Transients under Light Illumination
- Analysis of Gate Lag in GaAs Metal-Semiconductor Field-Effect Transistor Using Light Illumination
- Inverse Photoemission Spectroscopy Study on the Oxidation of Titanium Thin Film
- Extended Appearance Potential Fine Structure Analysis of Chromium
- The Adsorption Process of Hydrogen on Titanium Films, a CPD and QCM Study
- Heat Treatment Effects of ZnO:Al Thin Films Prepared by Facing-Target-Type Sputtering Method
- On the Parameter Estimation of Exponentially Damped Signal in the Noisy Circumstance
- On the Frequency Estimation of Signal by Using the Expansion of LP Method in the Noisy Circumstance
- Study on the development of a practical system for discrimination and concentration-estimation of domestic gases
- The Periodic Operation of a Semiconductor Gas Sensor and Its Application to the Discrimination of Inflammable Gases
- Somatometric Measurements of University Students from 1980 to 1993
- METALLOTHIONEIN (MT-1, -2) DEFICIENCY INDUCED DOWN-REGULATION OF DOPAMINERGIC NEURON IN METALLOTHIONEIN-KNOCKOUT AND/OR Hg^0-EXPOSURED MICE BRAIN
- Superconducting Wired-Wall Cavity for V-Band ENDOR Experiment
- Changes in Electrical Resistance and Auger Electron Appearance Potential Spectra of Titanium Thin Films by Oxygen Diffusion
- Surface Structure Analysis of Polycrystalline Zinc by SEELFS and EAPFS
- The Analysis of Surface Extended Energy Loss Fine Structure of Zinc Oxide
- Appearance Potential Spectra of Cr, Cr_2O_3, and Stainless Steel 304
- X-Ray Photo-Electron Appearance Potential Spectrum of Titanium
- Low Energy Electron Contributions to Auger Electron Appearance Potential Spectrum of Carbon
- Soft X-Ray Appearance Potential Spectra of Titanium Oxide and Alloy
- Mossbauer Study of Fe-Zr Alloys Formed at Interfaces between Fe and Zr Thin Films
- Mossbauer Study of Fe-Ti Alloys Formed at Interfaces between Fe and Ti Thin Films
- Observation of Sorption of 0_2 and N_z on Ti Thin Film by DAPS, AEAPS, AES and Electrical Resistance Methods
- Comparison of Sorption Process in Titanium and Vanadium Films
- Hepatoprotective Effects of Whey Protein on D-Galactosamine-Induced Hepatitis and Liver Fibrosis in Rats
- Estimation on Surface Atomic Layer Spacing of Nickel and Iron Single Crystals
- B-42. Evaluation of Myelogeaphy Using Water-Soluble Contrast Media in Diagnosis of Lumber Disc Hermia
- Quasi-Instantaneous Measurements of Titanium Compunds Using Auger Electron and Auger Electron Appearance Potential Spectroscopies
- Effects of pantoyl-GABA on GABAA and GABAB receptors in the rat brain.
- Current Sensor Based Home Appliance and State of Appliance Recognition