Dielectric Properties of Plasma-Polymerized Tetrafluoroethylene Films : Chemistry : incl. physical process
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概要
- 論文の詳細を見る
A plasma-polymerized tetrafluoroethylene film has dielectric loss peaks below -50℃ and approximately at 40℃. The effects of the substrate temperature during polymerization and of plasma irradiation after polymerization on the appearance of the peaks were studied. The low-temperature peak seems to be due to local-mode relaxation of polar groups, while the high-temperature peak seems to be due to phase transition.
- 社団法人応用物理学会の論文
- 1988-06-20
著者
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Nakano Toshiki
Department Of Electrical And Electronic Engineering National Defense Academy
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Nakano Toshiki
Department Of Electrical Engineering Waseda University
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Ohki Yoshimichi
Department Of Electrical Electronic And Computer Engineering Waseda University
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FUKUYAMA Masao
Department of Electrical Engineering, Waseda University
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Fukuyama Masao
Department Of Electrical Engineering Waseda University
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