Enhanced Crystallization of Strontium Bismuth Tantalate Thin Films by Irradiation of Elongated Pulses of KrF Excimer Laser
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概要
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The pulse width of a KrF excimer laser was elongated from 40 to 60 ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to $10^{3}$ times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-15
著者
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Ohki Yoshimichi
Department Of Electrical Electronic And Computer Engineering Waseda University
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Choi In-Hoon
Division of Material Science and Engineering, Korea University, 5-1 Anam-dong, Sungbuku-ku, Seoul 136-701, Korea
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Tsubuku Masashi
Department of Electrical Engineering and Bioscience, Waseda University, Shinjuku-ku, Tokyo 169-8555, Japan
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Seol Kwang
Department of Electrical Engineering and Bioscience, Waseda University, Shinjuku-ku, Tokyo 169-8555, Japan
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