Effects of Carbon Atoms on the Defects in Czochralski-Grown Silicon Formed by Annealing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-09-20
著者
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HONDA Makoto
Department of Physics, Faculty of Science, Naruto University of Education
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Atobe K
Naruto Univ. Educ. Tokushima
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Honda M
Samco International Inc. Kyoto Jpn
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Atobe Kozo
Department Of Physics Faculty Of Science Naruto University Of Education
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FUKUOKA Noboru
Department of Physics, Faculty of Science, Naruto University of Education
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Fukuoka Noboru
Department Of Physics College Of General Education Osaka Univ.
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HONDA Makoto
Department of Environment and Life Sciences, Kyorin University School of Health Sciences
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