Characteristics of Bipolar Transistors with Various Depths of n^+ Buried Layers Formed by High-Energy Ion Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-02-15
著者
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Natsuaki N
Hitachi Ltd. Tokyo Jpn
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TAMBA Akihiro
Hitachi Research Laboratory, Hitachi Ltd.
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KOBAYASHI Yutaka
Hitachi Research Laboratory, Hitachi Ltd.
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SUZUKI Tadashi
Central Research Laboratory, Hitachi Ltd.
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NATSUAKI Nobuyoshi
Central Research Laboratory, Hitachi Ltd.
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Tamba Akihiro
Hitachi Research Laboratory Hitachi Ltd.
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Natsuaki Nobuyoshi
Central Research Laboratory Hitachi Ltd.
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Natsuaki Nobuyoshi
Central Laboratory Hitachi Ltd.
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Kobayashi Yutaka
Hitachi Research Laboratory
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Suzuki Tadashi
Central Research Institute Mitsui Toatsu Chemicals Inc.
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Suzuki Tadashi
Central Research Laboratory Hitachi Ltd.:(present Address) Device Development Center Hitachi Ltd.
関連論文
- Characteristics of Bipolar Transistors with Various Depths of n^+ Buried Layers Formed by High-Energy Ion Implantation
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