Observations of Channels of MOS Field Effect Transistors Using a Scanning-Electron Microscope
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1965-12-15
著者
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HIGUCHI Hisayuki
Central Research Laboratory, Hitachi Ltd.
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MAKI Michiyoshi
Central Research Laboratory, Hitachi Ltd.
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Higuchi Hisayuki
Central Research Laboratory Hitachi Ltd.
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Maki Michiyoshi
Central Research Laboratory Hitachi Ltd.
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