磁気力顕微鏡を利用した電流誘起磁場測定系の空間分解能の評価(計測・高周波デバイス)

概要

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A method for detecting current-induced magnetic fields by magnetic force microscopy (MFM) was proposed and demonstrated, as one candidate for quantitative current evaluation in fine structures with high spatial resolution. Our system consisted of a conventional MFM and a feedback system for elimination of electrostatic force. To determine the spatial resolution of our system, we fabricated a pair of 0.5-μm-wide Au wires with a 0.2 μm separation. In these wires, ac currents flowed in parallel. From a calculation of a magnetic field around the Au wires, we confirmed that magnetic field gradients existed on both sides of the current paths. Since the characteristics of the magnetic force signals on both sides of the current paths were clearly identified, we concluded that the spatial resolution of our system was better than 0.2 μm. The linear dependences of the peak amplitudes on the ac current values were also confirmed.
社団法人日本磁気学会の論文
2005-03-01