スパッタFe_<70>Co_<30>二元合金膜における軟磁気特性の膜厚依存性

概要

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Fe_<70>Co_<30> single-layer films with various thicknesses were deposited on glass substrates by RF sputtering. We investigated the dependence of magnetic properties and film structure on the film thickness. Fe-Co films with thicknesses of less than 50 nm show isotropic magnetic properties. Increasing the Fe-Co film thickness brings about uniaxial magnetic anisotropy and low coercive force. Frequency dependence of initial permeability for the 770-nm-thick Fe-Co film is markedly different from the theoretical one, because of magnetic anisotropy dispersion. With an increase in the Fe-Co film thickness, the crystal orientation changes and the I(21l)/I(llO) intensity ratio becomes stronger. These structural features may be related to the appearance of uniaxial magnetic anisotropy and low coercive force.
社団法人日本磁気学会の論文
2003-09-01