BCC固溶体下地層上に作製したCo/Cu多層膜のGMR効果の耐熱性

概要

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The thermal stability of the giant magnetoresistance (GMR) effect was examined in Co/Cu multilayers fabricated on various buffer layers with differing inter facial roughnesses and crystallographic orientations. In multilayers on body-centered cubic (BCC)-Cr_<90>Ni_<10> and (BCC)-Cr_<80>Fe_<20> buffer layers, the MR ratio is maintained at over 50% up to the annealing temperature of 300℃. On the other hand the MR ratio of the multilayer fabricated on δ-Cr_<63>(Ni-Fe)_<37> buffer layer and that of the multilayer fabricated with introducing impurity oxygen into the sputtering atmosphere, decreased significantly after the thermal annealing at relatively lower temperature. Secondary ion mass spectroscopy (SIMS) analysis for the multilayer on (BCC)-Cr_<90>Ni_<10> buffer layer shows a very small amount of atomic diffusion of buffer layer elements into the multilayer after thermal annealing, in comparison with data for multilayers fabricated on a δ-Cr_<63>(Ni-Fe)_<37> buffer layer. Through detailed structural analysis of the multilayers, it was concluded that the inter facial flatness at grain boundaries should be improved to prevent atomic inter-diffusion and to achieve high thermal stability of the GMR effect in Co/Cu multilayers.
2003-08-01