Crシード上に蒸着したAg薄膜の初期成長過程における構造変化

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Structural change in vapor-deposited Ag films on a ultrathin (<10Å) Cr seed layer during the coalescence process is discussed.During and after the deposition, the amplitude of surface acoustic waves (SAW) propagated on the piezoelectric substrate through the films deposited on it and the electric sheet resistivity of the films were measured.The microstructures of films with various thicknesses, d were examined with a scanning electron microscope.As a result, we found that (1) the critical thicknesses d_c at which the film becomes two-dimensionally continuous drastically decreased with increasing seed layer thickness, but (2) Ag films flattened by the Cr seed laver spontaneously tore when the deposition was interrupted at a thickness between d_p and d_c.We conclude that twodimensionally continuous ultra-thin Ag films thinner than 120Å can be prepared on a 3-Å-thick Cr seed layer by continuous deposition
社団法人日本磁気学会の論文
1998-04-15