カスプ磁場印加CZ法による400mmシリコン結晶育成用大型石英ルツボの熱環境予測(<小特集>バルク成長分科会特集 : シリコン結晶の最近の話題から)

概要

論文の詳細を見る
The development of Czhochralski silicon crystal 400 mm in diameter is progressing in Japan. The influence of a cusp magnetic field on thermal environment of huge silica crucible has been investigated by computer simulation. We expect that suppression of melt convection by Lorentz force can elongate the life time of silica crucible. Magnetic field slows down the melt flow and hence reduce the oxygen transport and the dissolution speed. We found the optimum magnetic strength with 36 and 48 inch silica crucible was about 2000 0e. In this region, crucible temperature was lower than in the absence of a magnetic field and temperature fluctuation in the molten silicon was very small. On the other hand, the oscillation of melt temperature was observed with the magnetic strength of 300 0e. the 2000 Oe, magnetic field leads to a rise in teh crucible wall temperature and softenit.
日本結晶成長学会の論文
1997-12-20