シリコン融液表面の対流直接観察(<特集>バルク成長)

概要

論文の詳細を見る
Convection on the silicon melt surface in a quartz crucible has great effect on the CZ silicon single crystallization. However it had been very difficult to visualize its motion. In this report, a silicon melt surface in a quartz crucibles was directly observed by a visicon camera in order to recongnize such a convective phenomena. Measured images were recorded on video tapes and their motion after enhancement of the image contrast by an image processor was analyzed. In the cases of applying cusp magnetic field or no magnetic field, irregularly shaped black band images were observed. When the crucible rotation rate was 0 rpm, those black bands seemed to flow towards only one direction on the melt surface in the case of no magnetic field. On the contrary, those black bands seemd to be almost stopped their motions in the case of applying cups magnetic field. When crucible rotation rates were raised from 2 rpm to 15 rpm, those black bands were splitted into many black bands and showed complicated network pat-terns in the case of applying cusp magnetic field or no magnetic field. From the above results, the convective phenomena on the silicon melt surface might be reflected on the observed images.
日本結晶成長学会の論文
1991-02-15