3229 マイクロ光造形法を用いた静電アクチュエータ

概要

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We propose a micro friction sensor for next generation HDD of a contact recording system. As the necessary technology. We are studing Electrostatic Actuator fabricated by Micro stereolithography which method can produce micro structure. In this study, experiment of macro scale model was done t to study mechanical property of photopolymerizable resin which is used to form the movable cantilever in front of static electrode. As a result, resonant frequency and Q-value increased with thickness of two conductive thin film (Cu 8-300nm) which coat both side of photopolymerized resin. This tendency will come out remarkably in micro sized structure and thus it is useful for micro actuator in the point of possibility of variable mechanical property controlled by conductive film thickness.
社団法人日本機械学会の論文
2003-08-05