327 強磁性形状記憶合金Ni_2MnGa薄膜の作製と評価(OS 多機能・複合機能化への材料協調設計)

概要

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Ferromagnetic shape memory alloy Ni_2MnGa has Heusler type crystal structure. In this alloy, the martensitic transformation occurs within the ferromagnetic temperature range. Using the melt spinning method and the sputtering method, several kinds of Ni_2MnGa thin films were fabricated in order to study the physical and mechanical properties. These thin film specimens had good crystallinity and showed the crystal structure as same as bulk specimen. Rapidly solidified Ni_2MnGa ribbons made by single roll melt spinning method were 20μm in thickness and 1mm in width. The transformation temperatures, Ms, Mf, As and Af, were 120, 90, 125 and 150K, respectively. This was a brittle specimen. Sputtered Ni_2MnGa thin films were made by using a high frequency magnetron sputtering apparatus. The thickness of the thin film was 5μm. The films deposited on the poly-vinyl alcohol substrate showed shape memory effect.
社団法人日本機械学会の論文
2000-11-24