2542 薄膜センサ材としてのMe-C:H膜の電気磁気的特性の評価(J10-9 高分子・薄膜,J10 知的材料・構造システム)

概要

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Diamond-like carbon film is a kind of hard coating layers which consists of hydrogen, carbon, and oxygen If the condition of the carbon bond and the content of the hydrogen change, the physical properties of a diamond-like carbon film become different It is also well known as a material with the excellent mechanical properties, such as low friction, higher hardness, and high biocompatibility. New features in addition to the good mechanical properties may appear in the diamond-like carbon films containing metals. Metal addition newly gives electrical conductivity in the film, though the film without metals is originally an insulator. Furthermore, the changing characteristic of the electrical resistance by external factors, such as a temperature, an external magnetic field, and a pressure, can be given. The usage of a diamond-like carbon film with the new functionality which was not in the conventional coating material maybe expected. We have already proposed a coated type thin film sensor as one of the applications of an amorphous hydrogenation carbon thin film with new functionality. In this paper, we report the new functionality (magnetic property, electrical property, etc.) of the diamond-like carbon film which contains transition metals as an additional element.
社団法人日本機械学会の論文
2007-09-07