DLC硬質膜を用いた温度センサの機能性評価(J09-6 プロセス,J09 知的材料・構造システム)

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This paper describes the possibility of Me-DLN films as temperature sensor. DLC is used as coating material for the cutting tools up to now. The problem is low adherence between film and substrates. In order to solve it DLN was proposed. In this study Metal-containing DLN was deposited onto ceramics substrate by DC and RF discharged of siloxane vapor. During deposition metal phase was fabricated by magnetron sputtering of metal target. Temperature-conductivity dependence was measured by standard 4-terminal method in the temperature range of 80-400 K in vacuum. Dimensionless temperature sensitivity of investigated films are calculated as a evaluation of temperature sensors. All films are demonstrated weak temperature dependence of conductivity and calculation of dimensionless temperature sensitivity show that Me-DLN has a possibility to be used as wide range temperature sensors. And Me-DLN temperature sensors are hoped to have not only the properties of coating materials but also sensing function.
社団法人日本機械学会の論文
2004-09-04