<報文>ナノインデンテーション法による LaNi_5 スパッタ薄膜の機械的特性の評価

概要

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LaNi_5 intermetallic compound has superior hydrogen-absorption and -desorption properties, and it is well known as a hydrogen storage material. Thin films of hydrogen storage alloy may be used as electrode of rechargeable batteries or fuel cell, a filter for hydrogen purification and various kinds of sensor. LaNi_5 thin films were prepared by a radio frequency magnetron sputtering apparatus with a sputtering power of 50-400W at substrate temperature of 323-573K. Mechanical properties of the films such as hardness and elastic modulus were investigated with respect to the sputtering conditions using nanoindentation in the present study. The difference in the structure gave an effect to the hardness of the films. For the same structure, the films deposited at higher sputtering power and higher substrate temperature showed higher hardness. The crystal orientation gave an effect to the elastic modulus of the films.lanthanum-nickelhydrogen storage alloymicrostructurehardnesselastic modulus
東北大学の論文
2001-03-01