超精密旋削加工機の開発と加工誤差補正

概要

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The study deals with the development of an ultraprecision lathe consisting of such elements as an air bearing spindle, a tool-moving device and a feed mechanism. The spindle-attaching workpiece is driven by an AC servomotor. The diamond tool is mounted to the tool-moving device driven by a piezoelectric actuator. The tool-moving device is mounted on the feed mechanism composed of the combination of the air slider and the friction drive. These elements, set on the concrete bed supported by air dampers, are placed in a clean booth. The lathe is enabled to produce a workpiece of aluminum alloy with the accuracy of 0.24 μm in surface flatness and R_<max> 94nm in surface roughness. In addition, the movement error of the feed mechanism and the spindle rotation error are measured to improve the machining accuracy. The tool-position control on the basis of measured errors leads to the improvement of surface flatness.
1991-10-25