超精密フライス加工の研究 : 加工機の構成と加工結果

概要

論文の詳細を見る
The study deals with the development of ultraprecision milling machine, which allows to produce workpieces with sculptured surface. Until now, a variety of precise parts such as optical lens, laser reflective mirror, disc substrate and so on have been produced by ultraprecision turning lathes. However, the ultraprecision lathe can not cope with making sculptured surface, whose requirement is considered to increase. The ultraprecision milling machine developed in the study consists of an air spindle with a milling tool and a three-axis feed mechanism on which a workpiece is mounted. As a milling tool, a pseudo ball-endmill is designed by slightly offsetting a conventional diamond tool having a nose radius. It is found that the ultraprecision milling machine can produce workpieces with curved surface in surface roughness of 78 nm R_<max>.
一般社団法人日本機械学会の論文
1992-10-25