超精密フライス加工による三次元マイクロマシニングの高度化 : 第2報, 工具系の高精度化)

概要

論文の詳細を見る
This study deals with the improvement of ultraprecision micromachining technology by devising a tool chucking mechanism. A lathe-type ultraprecision milling machine equipped with an improved pseudo ball end mill as a cutting tool was designed to create tiny parts with nm-order surface roughness. The dimensional accuracy and surface roughness are significantly influenced by the rotational accuracy of the pseudo ball end mills, which are mounted on the spindle using a chucking mechanism. To meet the requirement, a new chucking mechanism was devised as a substitute of a three-jaw-type chuck to improve the setting repeatability of the tool. The new chucking mechanism enables the tool to be rightly positioned within the range of 0.2 μm. As a result, the ultraprecision milling machine equipped with the chucking mechanism and the tool was able to produce a traditional Noh mask on a copper surface of 1 mm in diameter with a surface roughness of 58 nm (p-v). In addition, it was found that the contour line pattern observed on the mask surface was due to a three dimensional cutter mark.
一般社団法人日本機械学会の論文
1997-10-25