超精密マイクロ溝加工の研究 : V形状格子溝の製作

概要

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The study deals with the manufacture of microgrooves with sharp edges and smooth oblique and/or curved surfaces by means of an ultraprecision milling machine and single crystal diamond endmills. Fine microgrooves are key components to fabricate micrograting, micrograting lens and so on. Conventional groove fabrication methods such as etching and lithography are difficult to make grooves without burr. The new machining method proposed in the study allows to produce V-shaped grooves of 100 μm in pitch with enough shape accuracy and surface roughness of 48 nm (p-v value). The method also makes it possible to form the microgroove of 1 μm in pitch with sharp edge and without burr. In addition, the method is experimentally found effective to produce R-shaped groove and trapozoid shaped one without burr.
一般社団法人日本機械学会の論文
1998-11-25