マイクロV溝を利用した微小部品の直接接合 : 2方向溝を用いた高精度位置決め

概要

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The study proposes a new method to accurately bond two small parts without any adhesives by making use of ultraprecision V-shaped microgrooves created on the surfaces of each part. These V-shaped microgrooves, whose depth and dihedral angle are 20 um and 1 3 degree respectively, allow small parts to be tightly bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between two mating surfaces. In the study, ultraprecision V-shaped microgrooves having two different directions are created by using an ultraprecision machining center with I nm positioning resolution and a single crystal diamond milling cutter. From experimental results, small parts of4 mm x 4 mm x 4 mm that have V-shaped micro-grooves in two directions could be tightly bonded with O.380 mm positioning accuracy. In addition, the new method has a possibility to bond different materials with each other. Two small parts with V-shaped microgrooves that are made of oxygen-free copper and aluminum are subjected to bonding test. The test shows the accurate and strong bonded result. As a result, the proposed bonding method is found to be effective to connect small parts accurately.
公益社団法人精密工学会の論文
2001-02-05