旋盤形超精密フライス加工機による自由曲面のマイクロマシニング

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Micro-machining technology is in general well known in the field of photolithography technique, where most of material to be used are brittle ones such as silicon-oxide. From now on, however, the requirement of producing micro-machine and/or micro-mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. Thus, the study deals with the micro-machining of metal workpieces with sculptured surface by use of an ultra-precision milling machine newly developed. The lathe-type ultra-precision milling machine, consisting of Z-motion table, positionable spindle on it as C-rotational axis, X-motion table and B-rotational table on it, is equipped with a pseude ball endmill composed of a single crystal diamond tool mounted at the top of high speed air spindle on B-rotational table. Two control programs were developed to carry out 3-axis and 4-axis control micro-machining respectively. 3-axis control program enables the tool to produce a human face-like surface with the surface roughness of 77 nm(R_<max>) within the area of 3.5 mm square. On the other hand, 4-axis control is to cope with the machining of workpieces with a steep incline, changing the tool attitude by B-rotational table. The cutting experiment shows the potential of 4-axis control ultra-precision milling of workpieces with a steep incline. As a result, the possibility of generating ultra-precision sculptured surfaces is experimentally confirmed with metal workpieces.
一般社団法人日本機械学会の論文
1995-01-25

旋盤形超精密フライス加工機による自由曲面のマイクロマシニング

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