超精密フライス加工による三次元マイクロマシニングの高度化

概要

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This study deals with the improvement of ultraprecision micromachining technology used to cut metal workpieces with sculpted surfaces. A lathe-type ultraprecision milling machine is used, which consists of X and Z motion tables with resolution of 1 nm, and a C axis-positionabIe spindle with resolution of 0.0001 degree. As a milling tool, an improved pseudo ball endmill, composed of a single crystal diamond tool, is mounted at the top of the high-speed air spindle on the X-table. The cooperative movement along X and C axes allows three, dimensional milling. The interference between the tool frank and workpiece surface is investigated to improve the surface roughness, and slow feed speed is found to be effective in the cutting tool. As all example of three-dimensional micromachinining, the ultraprecision machine was used to produce a traditional Noh mask on a copper surface 3 mm in dianmeter, based on the scanning data obtained with a digitizer. It is proven that the ultraprecision milling machine has the potential of producing workpieces with surface roughness of 69 nm (p-v value).
一般社団法人日本機械学会の論文
1995-07-25