多重干渉法によるFDDのヘッドスペーシング計測

概要

論文の詳細を見る
A small, high-capacity flexible disk drive (FDD) requires stable contact between the disk and the sliders for good recording and reproducing characteristics. Measurement of the spacing between the disk and the slider surfaces has been reported. However, the spacing could not be measured quantitatively by means of interference fringes because the sliders move in contact with the disk. In this report, measurement of the small spacing in the FDD is described. Use of an imitation glass slider, the upper and lower surfaces of which are slightly tilted forward each other so that interference fringes occur even if the sliders and the disk are substantially in contact, is proposed. By means of a technique of laser beam multi-interference fringes among the three interfaces of the upper and lower surfaces of the slider and the disk surface, the dynamically changing spacing is measured as displacement of the interference fringes. In this report, the measurement principle is described, and experimental results demonstrating the validity of the principle are presented.
一般社団法人日本機械学会の論文
1997-08-25